Elemental redistribution of Pt and Pd in nickel silicides: a comparative study

No Thumbnail [100%x80]
View/open
Metadata
Show full item record
Authors
Schrauwen, A.; Demeulemeester, Jelle; Kumar, Arul; De Schutter, B.; Vandervorst, Wilfried; Detavernier, C.M.; Comrie, C.M.; Temst, Kristiaan; Vantomme, Andre
Conference
Materials for Advanced Metallization - MAM
Title
Elemental redistribution of Pt and Pd in nickel silicides: a comparative study
Publication type
Meeting abstract
Embargo date
9999-12-31
Collections