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Structural factors influencing the volatile sensitivity of polymer coated piezoelectric micromechanical resonators

dc.contributor.authorSieben-Xu, Ling
dc.date.accessioned2021-10-20T16:06:15Z
dc.date.available2021-10-20T16:06:15Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21506
dc.sourceIIOimport
dc.titleStructural factors influencing the volatile sensitivity of polymer coated piezoelectric micromechanical resonators
dc.typeOral presentation
dc.source.peerreviewno
dc.source.conference14th International Meeting on Chemical Sensors - IMCS
dc.source.conferencedate20/05/2012
dc.source.conferencelocationNürnberg Germany
imec.availabilityPublished - imec


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