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System optimization methodology for integrated piezoelectric MEMS resonator biochemical sensors
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Authors
Sieben-Xu, Ling
;
Pettine, Julia
;
Petrescu, Violeta
;
Vandecasteele, Marianne
;
Karabacak, Devrez
Conference
26th European Conference on Solid-State Transducers - EUROSENSOR
Title
System optimization methodology for integrated piezoelectric MEMS resonator biochemical sensors
Publication type
Proceedings paper
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