Challenges and opportunities in advanced Ge pMOSFETs

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Authors

Simoen, Eddy; Mitard, Jerome; Hellings, Geert; Eneman, Geert; De Jaeger, Brice; Witters, Liesbeth; Vincent, Benjamin; Loo, Roger; Delabie, Annelies; Sioncke, Sonja; Caymax, Matty; Claeys, Cor

ISSN

1369-8001

Issue

6

Journal

Materials Science in Semiconductor Processing

Volume

15

Title

Challenges and opportunities in advanced Ge pMOSFETs

Publication type

Journal article

Embargo date

9999-12-31

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