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Passivation challenges with Ge and III/V devices

dc.contributor.authorSioncke, Sonja
dc.contributor.authorLin, Dennis
dc.contributor.authorNyns, Laura
dc.contributor.authorDelabie, Annelies
dc.contributor.authorThean, Aaron
dc.contributor.authorHoriguchi, Naoto
dc.contributor.authorStruyf, Herbert
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorCaymax, Matty
dc.date.accessioned2021-10-20T16:14:13Z
dc.date.available2021-10-20T16:14:13Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21522
dc.sourceIIOimport
dc.titlePassivation challenges with Ge and III/V devices
dc.typeProceedings paper
dc.contributor.imecauthorLin, Dennis
dc.contributor.imecauthorNyns, Laura
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorThean, Aaron
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorCaymax, Matty
dc.contributor.orcidimecNyns, Laura::0000-0001-8220-870X
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage97
dc.source.endpage110
dc.source.conferenceGraphene, Ge/III-V, Nanowires, and Emerging Materials for Post-CMOS Applications 4
dc.source.conferencedate6/05/2012
dc.source.conferencelocationSeattle, WA USA
imec.availabilityPublished - open access
imec.internalnotesECS Transactions; Vol. 45; Issue 4


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