Show simple item record

Comparison of directed self-assembly integrations

dc.contributor.authorSomervell, Mark
dc.contributor.authorGronheid, Roel
dc.contributor.authorHooge, Joshua
dc.contributor.authorNafus, Kathleen
dc.contributor.authorRincon Delgadillo, Paulina
dc.contributor.authorThode, Chris
dc.contributor.authorYounkin, Todd
dc.contributor.authorMatsunaga, Koichi
dc.contributor.authorRathsack, Ben
dc.contributor.authorScheer, Steven
dc.contributor.authorNealy, Paul
dc.date.accessioned2021-10-20T16:17:01Z
dc.date.available2021-10-20T16:17:01Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21528
dc.sourceIIOimport
dc.titleComparison of directed self-assembly integrations
dc.typeProceedings paper
dc.contributor.imecauthorGronheid, Roel
dc.contributor.imecauthorNafus, Kathleen
dc.contributor.imecauthorRincon Delgadillo, Paulina
dc.contributor.imecauthorScheer, Steven
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage83250G
dc.source.conferenceAdvances in Resist Materials and Processing Technology XXIX
dc.source.conferencedate12/02/2012
dc.source.conferencelocationSan Jose, CA USA
imec.availabilityPublished - open access
imec.internalnotesProceedings SPIE; Vol. 8325


Files in this item

Thumbnail
Name:
24710.pdf
Size:
2.188Mb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record