Show simple item record

Capacitance measurements of 2-dimensional and 3-dimensional IC interconnect structures by quasi-static C-V technique

dc.contributor.authorStucchi, Michele
dc.contributor.authorVelenis, Dimitrios
dc.contributor.authorKatti, Guruprasad
dc.date.accessioned2021-10-20T16:34:10Z
dc.date.available2021-10-20T16:34:10Z
dc.date.issued2012
dc.identifier.issn0018-9456
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21565
dc.sourceIIOimport
dc.titleCapacitance measurements of 2-dimensional and 3-dimensional IC interconnect structures by quasi-static C-V technique
dc.typeJournal article
dc.contributor.imecauthorStucchi, Michele
dc.contributor.imecauthorVelenis, Dimitrios
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1979
dc.source.endpage1990
dc.source.journalIEEE Transactions on Instrumentation and Measurement
dc.source.issue7
dc.source.volume61
imec.availabilityPublished - open access


Files in this item

Thumbnail
Name:
23756.pdf
Size:
890.7Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record