Authors

Stucchi, Michele; Velenis, Dimitrios; Katti, Guruprasad

ISSN

0018-9456

Issue

7

Journal

IEEE Transactions on Instrumentation and Measurement

Volume

61

Title

Capacitance measurements of 2-dimensional and 3-dimensional IC interconnect structures by quasi-static C-V technique

Publication type

Journal article

Embargo date

9999-12-31