Publication:
Capacitance measurements of 2-dimensional and 3-dimensional IC interconnect structures by quasi-static C-V technique
Date
| dc.contributor.author | Stucchi, Michele | |
| dc.contributor.author | Velenis, Dimitrios | |
| dc.contributor.author | Katti, Guruprasad | |
| dc.contributor.imecauthor | Stucchi, Michele | |
| dc.contributor.imecauthor | Velenis, Dimitrios | |
| dc.date.accessioned | 2021-10-20T16:34:10Z | |
| dc.date.available | 2021-10-20T16:34:10Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 2012 | |
| dc.identifier.issn | 0018-9456 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/21565 | |
| dc.source.beginpage | 1979 | |
| dc.source.endpage | 1990 | |
| dc.source.issue | 7 | |
| dc.source.journal | IEEE Transactions on Instrumentation and Measurement | |
| dc.source.volume | 61 | |
| dc.title | Capacitance measurements of 2-dimensional and 3-dimensional IC interconnect structures by quasi-static C-V technique | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | Original bundle
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