| dc.contributor.author | Sygellou, L. | |
| dc.contributor.author | Tielens, Hilde | |
| dc.contributor.author | Adelmann, Christoph | |
| dc.contributor.author | Ladas, Spyros | |
| dc.date.accessioned | 2021-10-20T16:39:35Z | |
| dc.date.available | 2021-10-20T16:39:35Z | |
| dc.date.issued | 2012 | |
| dc.identifier.issn | 0167-9317 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/21576 | |
| dc.source | IIOimport | |
| dc.title | An X-ray photoelectron spectroscopy study of strontium-titanate-based high-k film stacks | |
| dc.type | Journal article | |
| dc.contributor.imecauthor | Tielens, Hilde | |
| dc.contributor.imecauthor | Adelmann, Christoph | |
| dc.contributor.orcidimec | Adelmann, Christoph::0000-0002-4831-3159 | |
| dc.date.embargo | 9999-12-31 | |
| dc.source.peerreview | yes | |
| dc.source.beginpage | 138 | |
| dc.source.endpage | 140 | |
| dc.source.journal | Microelectronic Engineering | |
| dc.source.issue | 1 | |
| dc.source.volume | 90 | |
| imec.availability | Published - open access | |
| imec.internalnotes | Paper presented at Micro&Nano2010 Conference, Athens, Dec 2010 | |
