An X-ray photoelectron spectroscopy study of strontium-titanate-based high-k film stacks

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Authors

Sygellou, L.; Tielens, Hilde; Adelmann, Christoph; Ladas, Spyros

ISSN

0167-9317

Issue

1

Journal

Microelectronic Engineering

Volume

90

Title

An X-ray photoelectron spectroscopy study of strontium-titanate-based high-k film stacks

Publication type

Journal article

Embargo date

9999-12-31

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