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An X-ray photoelectron spectroscopy study of strontium-titanate-based high-k film stacks
Publication:
An X-ray photoelectron spectroscopy study of strontium-titanate-based high-k film stacks
Date
2012
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Sygellou, L.
;
Tielens, Hilde
;
Adelmann, Christoph
;
Ladas, Spyros
Journal
Microelectronic Engineering
Abstract
Description
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1862
since deposited on 2021-10-20
Acq. date: 2025-10-28
Citations
Metrics
Views
1862
since deposited on 2021-10-20
Acq. date: 2025-10-28
Citations