An X-ray photoelectron spectroscopy study of strontium-titanate-based high-k film stacks

dc.contributor.author	Sygellou, L.
dc.contributor.author	Tielens, Hilde
dc.contributor.author	Adelmann, Christoph
dc.contributor.author	Ladas, Spyros
dc.contributor.imecauthor	Tielens, Hilde
dc.contributor.imecauthor	Adelmann, Christoph
dc.contributor.orcidimec	Adelmann, Christoph::0000-0002-4831-3159
dc.date.accessioned	2021-10-20T16:39:35Z
dc.date.available	2021-10-20T16:39:35Z
dc.date.embargo	9999-12-31
dc.date.issued	2012
dc.identifier.issn	0167-9317
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/21576
dc.source.beginpage	138
dc.source.endpage	140
dc.source.issue	1
dc.source.journal	Microelectronic Engineering
dc.source.volume	90
dc.title	An X-ray photoelectron spectroscopy study of strontium-titanate-based high-k film stacks
dc.type	Journal article
dspace.entity.type	Publication
Files	Original bundle Name: 22456.pdf Size: 214.09 KB Format: Adobe Portable Document Format Download
Publication available in collections:	Articles