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An X-ray photoelectron spectroscopy study of strontium-titanate-based high-k film stacks
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An X-ray photoelectron spectroscopy study of strontium-titanate-based high-k film stacks
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Date
2012
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Sygellou, L.
;
Tielens, Hilde
;
Adelmann, Christoph
;
Ladas, Spyros
Journal
Microelectronic Engineering
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1866
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Acq. date: 2025-12-15
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Views
1866
since deposited on 2021-10-20
1
last month
Acq. date: 2025-12-15
Citations