Publication:

Improvement of the crystalline quality of β-Ga2O3 films by high-temperature annealing

Date

2012
Journal article
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Author(s)

Takahara, Motoki
;
Funasaki, Suguru
;
Kudou, Jyun
;
Tsunoda, Isao
;
Takakura, Kenichiro  
;
Ohyama, Hidenori
;
Nakashima, Toshiyuki
;
Shibuya, Mutsuo
;
Murakami, Katsuya
;
Simoen, Eddy  
;
Claeys, Cor

Journal

Materials Science Forum

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