Improvement of the crystalline quality of β-Ga2O3 films by high-temperature annealing

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Authors
Takahara, Motoki; Funasaki, Suguru; Kudou, Jyun; Tsunoda, Isao; Takakura, Kenichiro; Ohyama, Hidenori; Nakashima, Toshiyuki; Shibuya, Mutsuo; Murakami, Katsuya; Simoen, Eddy; Claeys, Cor
ISSN
0255-5476
Journal
Materials Science Forum
Volume
725
Title
Improvement of the crystalline quality of β-Ga2O3 films by high-temperature annealing
Publication type
Journal article
Embargo date
9999-12-31
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