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Investigation of the Si doping effect in b-Ga2O3 films by co-sputtering of gallium oxide and Si
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Authors
Takakura, K.
;
Funasaki, S.
;
Tsunoda, I.
;
Ohyama, H.
;
Takeuchi, D.
;
Nakashima, T.
;
Shibuya, M.
;
Murakami, K.
;
Simoen, Eddy
;
Claeys, Cor
ISSN
0921-4526
Issue
15
Journal
Physica B: Condensed Matter
Volume
407
Title
Investigation of the Si doping effect in b-Ga2O3 films by co-sputtering of gallium oxide and Si
Publication type
Journal article
Embargo date
9999-12-31
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