Authors

Tallarida, Massimo; Adelmann, Christoph; Delabie, Annelies; Van Elshocht, Sven; Caymax, Matty; Schmeisser, Dieter

Conference

E-MRS Spring Meeting Symposium M: More than Moore: Novel materials approaches for functionalized Silicon based Microelectronics

Title

GaAs clean up studied with synchrotron radiation photoemission

Publication type

Proceedings paper

Embargo date

9999-12-31