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Evaluation of high-speed linear air-knife based wafer dryer

dc.contributor.authorTamaddon, Amir-Hossein
dc.contributor.authorBelmiloud, Naser
dc.contributor.authorDoumen, Geert
dc.contributor.authorStruyf, Herbert
dc.contributor.authorMertens, Paul
dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-10-20T16:44:38Z
dc.date.available2021-10-20T16:44:38Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21586
dc.sourceIIOimport
dc.titleEvaluation of high-speed linear air-knife based wafer dryer
dc.typeMeeting abstract
dc.contributor.imecauthorTamaddon, Amir-Hossein
dc.contributor.imecauthorDoumen, Geert
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecTamaddon, Amir-Hossein::0000-0003-4566-0697
dc.source.peerreviewyes
dc.source.beginpage6.5
dc.source.conference11th International Symposium on Ultra Clean Processing of Semiconductor Surfaces - UCPSS
dc.source.conferencedate16/09/2012
dc.source.conferencelocationGent Belgium
imec.availabilityPublished - imec


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