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Tackling corrosion issues that occur during the chemical mechanical polishing process

dc.contributor.authorTeugels, Lieve
dc.contributor.authorKellens, Kristof
dc.contributor.authorHeylen, Nancy
dc.date.accessioned2021-10-20T16:52:52Z
dc.date.available2021-10-20T16:52:52Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21603
dc.sourceIIOimport
dc.titleTackling corrosion issues that occur during the chemical mechanical polishing process
dc.typeOral presentation
dc.contributor.imecauthorTeugels, Lieve
dc.contributor.imecauthorKellens, Kristof
dc.contributor.imecauthorHeylen, Nancy
dc.contributor.orcidimecTeugels, Lieve::0000-0002-6613-9414
dc.source.peerreviewno
dc.source.conferenceBASF Corrosion Workshop
dc.source.conferencedate10/10/2012
dc.source.conferencelocationLudwigshaven Germany
imec.availabilityPublished - imec


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