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New CMP challenges at imec

dc.contributor.authorTeugels, Lieve
dc.contributor.authorKorner, Manuela
dc.contributor.authorHeylen, Nancy
dc.contributor.authorPham, Nga
dc.contributor.authorLeunissen, Peter
dc.date.accessioned2021-10-20T16:53:20Z
dc.date.available2021-10-20T16:53:20Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21604
dc.sourceIIOimport
dc.titleNew CMP challenges at imec
dc.typeOral presentation
dc.contributor.imecauthorTeugels, Lieve
dc.contributor.imecauthorHeylen, Nancy
dc.contributor.imecauthorPham, Nga
dc.contributor.orcidimecTeugels, Lieve::0000-0002-6613-9414
dc.source.peerreviewno
dc.source.conferenceClarkson University CAMP Seminar
dc.source.conferencedate16/08/2012
dc.source.conferencelocationPotsdam, NY USA
imec.availabilityPublished - imec


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