Show simple item record

Chemical mechanical polishing of nickel for damascene applications

dc.contributor.authorTeugels, Lieve
dc.contributor.authorVan den Eynde, Matthias
dc.contributor.authorDelande, Tinne
dc.contributor.authorLeunissen, Peter
dc.date.accessioned2021-10-20T16:53:47Z
dc.date.available2021-10-20T16:53:47Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21605
dc.sourceIIOimport
dc.titleChemical mechanical polishing of nickel for damascene applications
dc.typeOral presentation
dc.contributor.imecauthorTeugels, Lieve
dc.contributor.imecauthorVan den Eynde, Matthias
dc.contributor.imecauthorDelande, Tinne
dc.contributor.orcidimecTeugels, Lieve::0000-0002-6613-9414
dc.source.peerreviewno
dc.source.conference17th Annual International Cymposium on Chemical-Mechanical Planarization
dc.source.conferencedate12/08/2012
dc.source.conferencelocationLake Placid, NY USA
dc.identifier.urlhttp://www.clarkson.edu/camp/cmp2012.html
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record