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MEMS packaging and reliability: An undividable couple

dc.contributor.authorTilmans, Harrie
dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorHelin, Philippe
dc.contributor.authorCherman, Vladimir
dc.contributor.authorJourdain, Anne
dc.contributor.authorDe Moor, Piet
dc.contributor.authorVandevelde, Bart
dc.contributor.authorPham, Nga
dc.contributor.authorZekry, Joseph
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-20T16:55:46Z
dc.date.available2021-10-20T16:55:46Z
dc.date.issued2012
dc.identifier.issn0026-2714
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21609
dc.sourceIIOimport
dc.titleMEMS packaging and reliability: An undividable couple
dc.typeJournal article
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorHelin, Philippe
dc.contributor.imecauthorCherman, Vladimir
dc.contributor.imecauthorJourdain, Anne
dc.contributor.imecauthorDe Moor, Piet
dc.contributor.imecauthorVandevelde, Bart
dc.contributor.imecauthorPham, Nga
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.contributor.orcidimecVandevelde, Bart::0000-0002-6753-6438
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewyes
dc.source.beginpage2228
dc.source.endpage2234
dc.source.journalMicroelectronics Reliability
dc.source.issue9_10
dc.source.volume52
dc.identifier.urlhttp://dx.doi.org/10.1016/j.microrel.2012.06.029
imec.availabilityPublished - imec


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