MEMS packaging and reliability: An undividable couple

Metadata

Show full item record

Authors

Tilmans, Harrie; De Coster, Jeroen; Helin, Philippe; Cherman, Vladimir; Jourdain, Anne; De Moor, Piet; Vandevelde, Bart; Pham, Nga; Zekry, Joseph; Witvrouw, Ann; De Wolf, Ingrid

ISSN

0026-2714

Issue

9_10

Journal

Microelectronics Reliability

Volume

52

Title

MEMS packaging and reliability: An undividable couple

Publication type

Journal article

Collections

Articles