Publication:

MEMS packaging and reliability: An undividable couple

Date

2012
Journal article
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dc.contributor.authorTilmans, Harrie
dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorHelin, Philippe
dc.contributor.authorCherman, Vladimir
dc.contributor.authorJourdain, Anne
dc.contributor.authorDe Moor, Piet
dc.contributor.authorVandevelde, Bart
dc.contributor.authorPham, Nga
dc.contributor.authorZekry, Joseph
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorHelin, Philippe
dc.contributor.imecauthorCherman, Vladimir
dc.contributor.imecauthorJourdain, Anne
dc.contributor.imecauthorDe Moor, Piet
dc.contributor.imecauthorVandevelde, Bart
dc.contributor.imecauthorPham, Nga
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.contributor.orcidimecVandevelde, Bart::0000-0002-6753-6438
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.accessioned2021-10-20T16:55:46Z
dc.date.available2021-10-20T16:55:46Z
dc.date.issued2012
dc.identifier.issn0026-2714
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21609
dc.identifier.urlhttp://dx.doi.org/10.1016/j.microrel.2012.06.029
dc.source.beginpage2228
dc.source.endpage2234
dc.source.issue9_10
dc.source.journalMicroelectronics Reliability
dc.source.volume52
dc.title

MEMS packaging and reliability: An undividable couple

dc.typeJournal article
dspace.entity.typePublication
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