Publication:
Computer simulations of SiCl4/O2 ICP discharges used for coatings deposition or mask damage recovery
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1865 since deposited on 2021-10-20
2last month
Acq. date: 2026-01-11
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Views
1865 since deposited on 2021-10-20
2last month
Acq. date: 2026-01-11
Citations