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Interconnect scaling for10nm and beyond

dc.contributor.authorTokei, Zsolt
dc.contributor.authorde Marneffe, Jean-Francois
dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-20T16:58:42Z
dc.date.available2021-10-20T16:58:42Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21615
dc.sourceIIOimport
dc.titleInterconnect scaling for10nm and beyond
dc.typeMeeting abstract
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorde Marneffe, Jean-Francois
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conferenceAVS 59th International Symposium and Exhibition
dc.source.conferencedate29/10/2012
dc.source.conferencelocationTampa, FL USA
imec.availabilityPublished - open access
imec.internalnotesEM-TuA3


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