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Quantitative and predictive model of reading current variability in deeply scaled vertical poly-Si channel for 3D memories
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Authors
Toledano Luque, Maria
;
Degraeve, Robin
;
Kaczer, Ben
;
Tang, B.
;
Roussel, Philippe
;
Weckx, Pieter
;
Franco, Jacopo
;
Arreghini, Antonio
;
Suhane, Amit
;
Kar, Gouri Sankar
;
Van den Bosch, Geert
;
Groeseneken, Guido
;
Van Houdt, Jan
Conference
International Electron Devices Meeting - IEDM
Title
Quantitative and predictive model of reading current variability in deeply scaled vertical poly-Si channel for 3D memories
Publication type
Proceedings paper
Embargo date
9999-12-31
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