Toggle navigation
My submissions
Login
Toggle navigation
View item
imec Publications Repository
imec Publications
Conference contributions
View item
imec Publications Repository
imec Publications
Conference contributions
View item
JavaScript is disabled for your browser. Some features of this site may not work without it.
Spectroscopic study of polysilicon traps by means of fast capacitance transients
View/
open
25741.pdf (77.19Kb)
Metadata
Show full item record
Authors
Toledano Luque, Maria
;
Tang, Baojun
;
Degraeve, Robin
;
Kaczer, Ben
;
Simoen, Eddy
;
Van Houdt, Jan
;
Groeseneken, Guido
Conference
17th Workshop on Dielectrics in Microelectronics - WoDiM
Title
Spectroscopic study of polysilicon traps by means of fast capacitance transients
Publication type
Meeting abstract
Embargo date
9999-12-31
Collections
Conference contributions
Search imec Publications Repository
This collection
Browse
All of imec Publications Repository
Collections
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
This collection
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
My account
login