dc.contributor.author | Tous, Loic | |
dc.contributor.author | Lerat, Jean-Francois | |
dc.contributor.author | Emeraud, Thierry | |
dc.contributor.author | Negru, R. | |
dc.contributor.author | Huet, K. | |
dc.contributor.author | Uruena De Castro, Angel | |
dc.contributor.author | Aleman, Monica | |
dc.contributor.author | Russell, Richard | |
dc.contributor.author | John, Joachim | |
dc.contributor.author | Poortmans, Jef | |
dc.contributor.author | Mertens, Robert | |
dc.date.accessioned | 2021-10-20T17:05:24Z | |
dc.date.available | 2021-10-20T17:05:24Z | |
dc.date.issued | 2012 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/21628 | |
dc.source | IIOimport | |
dc.title | Nickel silicide formation using excimer laser annealing | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Tous, Loic | |
dc.contributor.imecauthor | Aleman, Monica | |
dc.contributor.imecauthor | John, Joachim | |
dc.contributor.imecauthor | Poortmans, Jef | |
dc.contributor.imecauthor | Mertens, Robert | |
dc.contributor.orcidimec | Tous, Loic::0000-0001-9928-7774 | |
dc.contributor.orcidimec | Poortmans, Jef::0000-0003-2077-2545 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 503 | |
dc.source.endpage | 509 | |
dc.source.conference | 2nd International Conference on Crystalline Silicon Photovoltaics - SiliconPV | |
dc.source.conferencedate | 3/05/2012 | |
dc.source.conferencelocation | Leuven Belgium | |
imec.availability | Published - imec | |
imec.internalnotes | Energy Procedia; Vol. 27 | |