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Progress in nickel silicide formation using excimer laser thermal annealing

dc.contributor.authorTous, Loic
dc.contributor.authorLerat, Jean-Francois
dc.contributor.authorEmeraud, Thierry
dc.contributor.authorNegru, R.
dc.contributor.authorHuet, Karim
dc.contributor.authorRussell, Richard
dc.contributor.authorJohn, Joachim
dc.contributor.authorPoortmans, Jef
dc.contributor.authorMertens, Robert
dc.date.accessioned2021-10-20T17:05:53Z
dc.date.available2021-10-20T17:05:53Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21629
dc.sourceIIOimport
dc.titleProgress in nickel silicide formation using excimer laser thermal annealing
dc.typeMeeting abstract
dc.contributor.imecauthorTous, Loic
dc.contributor.imecauthorJohn, Joachim
dc.contributor.imecauthorPoortmans, Jef
dc.contributor.imecauthorMertens, Robert
dc.contributor.orcidimecTous, Loic::0000-0001-9928-7774
dc.contributor.orcidimecPoortmans, Jef::0000-0003-2077-2545
dc.source.peerreviewyes
dc.source.beginpage691
dc.source.endpage695
dc.source.conference27th European Photovoltaic Solar Energy Conference and Exhibition - EUPVSEC
dc.source.conferencedate24/09/2012
dc.source.conferencelocationFrankfurt Germany
imec.availabilityPublished - imec


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