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An analytic method to compute the stress dependence on the dimensions and its influence in the characteristics of triple gate devices

dc.contributor.authorTrevisoli, R.D.
dc.contributor.authorMartino, J.A.
dc.contributor.authorSimoen, Eddy
dc.contributor.authorClaeys, Cor
dc.contributor.authorPavanello, M.A.
dc.date.accessioned2021-10-20T17:08:29Z
dc.date.available2021-10-20T17:08:29Z
dc.date.issued2012
dc.identifier.issn0026-2714
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21634
dc.sourceIIOimport
dc.titleAn analytic method to compute the stress dependence on the dimensions and its influence in the characteristics of triple gate devices
dc.typeJournal article
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage519
dc.source.endpage524
dc.source.journalMicroelectronics Reliability
dc.source.issue3
dc.source.volume52
imec.availabilityPublished - open access


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