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Suspended silicon nanowire devices for chemical and biological sensing

dc.contributor.authorTsuchiya, Yoshinage
dc.contributor.authorGhiass, Adel
dc.contributor.authorArab Assani, Fazeh
dc.contributor.authorMizuta, Hiroshi
dc.contributor.authorArmini, Silvia
dc.contributor.authorCherman, Vladimir
dc.contributor.authorDupre, Cecilia
dc.contributor.authorOllier, Eric
dc.contributor.authorBartch, Sebastien
dc.contributor.authorTsamados, Dimitrios
dc.contributor.authorIonescu, Adrian
dc.date.accessioned2021-10-20T17:15:09Z
dc.date.available2021-10-20T17:15:09Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21647
dc.sourceIIOimport
dc.titleSuspended silicon nanowire devices for chemical and biological sensing
dc.typeOral presentation
dc.contributor.imecauthorArmini, Silvia
dc.contributor.imecauthorCherman, Vladimir
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conferenceGdR Nanofils Nanotubes Semiconducteurs
dc.source.conferencedate13/11/2012
dc.source.conferencelocationRennes France
dc.identifier.urlhttp://iemn.univ-lille1.fr/base-web/GDRNanofil/Program-Rennes2012.pdf
imec.availabilityPublished - open access


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