Impact of EUV mask surface roughness on LER

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Authors
Vaglio Pret, Alessandro; Gronheid, Roel; Younkin, Todd; Leeson, Michael J.; Yan, Pei-Yang
Conference
Extreme Ultraviolet (EUV) Lithography III
Title
Impact of EUV mask surface roughness on LER
Publication type
Proceedings paper
Embargo date
9999-12-31
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