Publication:

Electrical and structural characterization of 150 nm CNT contacts with Cu damascene top metallization

Date

2012

Proceedings Paper

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Files

24791.pdf 2.04 MB

Author(s)

van der Veen, Marleen

;

;

Masahito, Sugiura

;

Kashiwagi, Yusaku

;

;

;

Vanpaemel, Johannes

;

Vereecken, Philippe

;

De Gendt, Stefan

;

Huyghebaert, Cedric

;

Statistics

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Acq. date: 2026-08-08