Show simple item record

Deposition of barrier materials for interconnects

dc.contributor.authorVan Elshocht, Sven
dc.date.accessioned2021-10-20T17:39:46Z
dc.date.available2021-10-20T17:39:46Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21698
dc.sourceIIOimport
dc.titleDeposition of barrier materials for interconnects
dc.typeOral presentation
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.source.peerreviewno
dc.source.conferenceEnhance Winter School
dc.source.conferencedate9/01/2012
dc.source.conferencelocationHelsinki finland
dc.identifier.urlhttp://www.enhance-itn.eu/mam/content/pdf/winter2/brochure-enhance-winter_school__final.pdf
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record