Dopant profiling in semiconductors with SIMS
dc.contributor.author | Vandervorst, Wilfried | |
dc.date.accessioned | 2021-10-20T18:00:44Z | |
dc.date.available | 2021-10-20T18:00:44Z | |
dc.date.issued | 2012 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/21738 | |
dc.source | IIOimport | |
dc.title | Dopant profiling in semiconductors with SIMS | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.conference | 14th Topical Conference on Quantitative Surface Analysis | |
dc.source.conferencedate | 28/10/2012 | |
dc.source.conferencelocation | Tampa, FL USA | |
imec.availability | Published - open access |