Show simple item record

Effect of porosity on the mechanical and fracture properties of advanced PECVD Ultralow-k SiCOH films

dc.contributor.authorVanstreels, Kris
dc.contributor.authorWu, Chen
dc.contributor.authorGonzalez, Mario
dc.contributor.authorVerdonck, Patrick
dc.contributor.authorMartini, Roberto
dc.contributor.authorSchneider, Dieter
dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-20T18:07:19Z
dc.date.available2021-10-20T18:07:19Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21752
dc.sourceIIOimport
dc.titleEffect of porosity on the mechanical and fracture properties of advanced PECVD Ultralow-k SiCOH films
dc.typeMeeting abstract
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.imecauthorWu, Chen
dc.contributor.imecauthorGonzalez, Mario
dc.contributor.imecauthorVerdonck, Patrick
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.contributor.orcidimecWu, Chen::0000-0002-4636-8842
dc.contributor.orcidimecVerdonck, Patrick::0000-0003-2454-0602
dc.source.peerreviewno
dc.source.beginpageO3-01
dc.source.conferenceMaterials for Advanced Metallization - MAM
dc.source.conferencedate11/03/2012
dc.source.conferencelocationGrenoble France
imec.availabilityPublished - imec
imec.internalnotesFull-length papers will be published in a special issue of Microelectronic Engineering


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record