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Intrinsic effect of porosity on mechanical and fracture properties of nanoporous ultralow-k dielectrics
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Authors
Vanstreels, Kris
;
Wu, Chen
;
Verdonck, Patrick
;
Baklanov, Mikhaïl
ISSN
0003-6951
Issue
12
Journal
Applied Physics Letters
Volume
101
Title
Intrinsic effect of porosity on mechanical and fracture properties of nanoporous ultralow-k dielectrics
Publication type
Journal article
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