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Intrinsic effect of porosity on mechanical and fracture properties of nanoporous ultralow-k dielectrics

dc.contributor.authorVanstreels, Kris
dc.contributor.authorWu, Chen
dc.contributor.authorVerdonck, Patrick
dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-20T18:07:47Z
dc.date.available2021-10-20T18:07:47Z
dc.date.issued2012
dc.identifier.issn0003-6951
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21753
dc.sourceIIOimport
dc.titleIntrinsic effect of porosity on mechanical and fracture properties of nanoporous ultralow-k dielectrics
dc.typeJournal article
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.imecauthorWu, Chen
dc.contributor.imecauthorVerdonck, Patrick
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.contributor.orcidimecWu, Chen::0000-0002-4636-8842
dc.contributor.orcidimecVerdonck, Patrick::0000-0003-2454-0602
dc.source.peerreviewyes
dc.source.beginpage123109
dc.source.journalApplied Physics Letters
dc.source.issue12
dc.source.volume101
imec.availabilityPublished - imec


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