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Optimized HF solutions in ULSI technology

dc.contributor.authorTeerlinck, Ivo
dc.contributor.authorMertens, Paul
dc.contributor.authorVos, Rita
dc.contributor.authorMeuris, Marc
dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-09-30T09:38:35Z
dc.date.available2021-09-30T09:38:35Z
dc.date.issued1997
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2175
dc.sourceIIOimport
dc.titleOptimized HF solutions in ULSI technology
dc.typeProceedings paper
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorVos, Rita
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.source.peerreviewno
dc.source.beginpage250
dc.source.endpage263
dc.source.conferenceProceedings of the Symposium on Environmental Aspects of Electrochemical Technology: Applications in Electronics
dc.source.conferencedate6/10/1996
dc.source.conferencelocationSan Antonio, TX USA
imec.availabilityPublished - imec


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