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Process control & integration options of RMG Technology for aggressively scaled devices

dc.contributor.authorVeloso, Anabela
dc.contributor.authorHiguchi, Yuichi
dc.contributor.authorChew, Soon Aik
dc.contributor.authorDevriendt, Katia
dc.contributor.authorRagnarsson, Lars-Ake
dc.contributor.authorSebaai, Farid
dc.contributor.authorSchram, Tom
dc.contributor.authorBrus, Stephan
dc.contributor.authorVecchio, Emma
dc.contributor.authorKellens, Kristof
dc.contributor.authorRohr, Erika
dc.contributor.authorEneman, Geert
dc.contributor.authorSimoen, Eddy
dc.contributor.authorCho, Moon Ju
dc.contributor.authorParaschiv, Vasile
dc.contributor.authorCrabbe, Yvo
dc.contributor.authorShi, Xiaoping
dc.contributor.authorTielens, Hilde
dc.contributor.authorVan Ammel, Annemie
dc.contributor.authorDekkers, Harold
dc.contributor.authorFavia, Paola
dc.contributor.authorGeypen, Jef
dc.contributor.authorBender, Hugo
dc.contributor.authorPhatak, Anup
dc.contributor.authordel Agua Borniquel, Jose Ignacio
dc.contributor.authorXu, K.
dc.contributor.authorAllen, M.
dc.contributor.authorLiu, C.
dc.contributor.authorXu, T.
dc.contributor.authorYoo, W.S.
dc.contributor.authorThean, Aaron
dc.contributor.authorHoriguchi, Naoto
dc.date.accessioned2021-10-20T18:16:00Z
dc.date.available2021-10-20T18:16:00Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21767
dc.sourceIIOimport
dc.titleProcess control & integration options of RMG Technology for aggressively scaled devices
dc.typeProceedings paper
dc.contributor.imecauthorVeloso, Anabela
dc.contributor.imecauthorDevriendt, Katia
dc.contributor.imecauthorRagnarsson, Lars-Ake
dc.contributor.imecauthorSebaai, Farid
dc.contributor.imecauthorSchram, Tom
dc.contributor.imecauthorBrus, Stephan
dc.contributor.imecauthorVecchio, Emma
dc.contributor.imecauthorKellens, Kristof
dc.contributor.imecauthorEneman, Geert
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorParaschiv, Vasile
dc.contributor.imecauthorTielens, Hilde
dc.contributor.imecauthorVan Ammel, Annemie
dc.contributor.imecauthorDekkers, Harold
dc.contributor.imecauthorFavia, Paola
dc.contributor.imecauthorGeypen, Jef
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthordel Agua Borniquel, Jose Ignacio
dc.contributor.imecauthorThean, Aaron
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.orcidimecDevriendt, Katia::0000-0002-0662-7926
dc.contributor.orcidimecRagnarsson, Lars-Ake::0000-0003-1057-8140
dc.contributor.orcidimecSchram, Tom::0000-0003-1533-7055
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.contributor.orcidimecDekkers, Harold::0000-0003-4778-5709
dc.contributor.orcidimecFavia, Paola::0000-0002-1019-3497
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage33
dc.source.endpage34
dc.source.conferenceSymposium on VLSI Technology - VLSIT
dc.source.conferencedate12/06/2012
dc.source.conferencelocationHonolulu. HI USA
imec.availabilityPublished - open access


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