Show simple item record

Characterization of carbon nanotubes based vertical interconnects

dc.contributor.authorVereecke, Bart
dc.contributor.authorvan der Veen, Marleen
dc.contributor.authorBarbarin, Yohan
dc.contributor.authorMasahito, Sugiura
dc.contributor.authorKashiwagi, Yusaku
dc.contributor.authorCott, Daire
dc.contributor.authorHuyghebaert, Cedric
dc.contributor.authorTokei, Zsolt
dc.date.accessioned2021-10-20T18:19:30Z
dc.date.available2021-10-20T18:19:30Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21774
dc.sourceIIOimport
dc.titleCharacterization of carbon nanotubes based vertical interconnects
dc.typeProceedings paper
dc.contributor.imecauthorVereecke, Bart
dc.contributor.imecauthorvan der Veen, Marleen
dc.contributor.imecauthorCott, Daire
dc.contributor.imecauthorHuyghebaert, Cedric
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecvan der Veen, Marleen::0000-0002-9402-8922
dc.contributor.orcidimecHuyghebaert, Cedric::0000-0001-6043-7130
dc.source.peerreviewyes
dc.source.beginpage648
dc.source.endpage649
dc.source.conferenceInternational Conference on Solid State Devices and Materials - SSDM
dc.source.conferencedate25/09/2012
dc.source.conferencelocationKyoto Japan
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record