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Surface passivation for Si solar cells: a combination of advanced surface cleaning and thermal atomic layer deposition of Al2O3
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Authors
Vermang, Bart
;
Rothschild, Aude
;
Kenis, Karine
;
Wostyn, Kurt
;
Bearda, Twan
;
Racz, A.
;
Loozen, Xavier
;
Mertens, Paul
;
Poortmans, Jef
;
Mertens, Robert
ISSN
1662-9779
Journal
Solid State Phenomena
Volume
187
Title
Surface passivation for Si solar cells: a combination of advanced surface cleaning and thermal atomic layer deposition of Al2O3
Publication type
Journal article
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