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Integration of III-V on Si for high-mobility CMOS

dc.contributor.authorWaldron, Niamh
dc.contributor.authorWang, G.
dc.contributor.authorNguyen, Ngoc Duy
dc.contributor.authorOrzali, Tommaso
dc.contributor.authorMerckling, Clement
dc.contributor.authorBrammertz, Guy
dc.contributor.authorOng, Patrick
dc.contributor.authorWinderickx, Gillis
dc.contributor.authorHellings, Geert
dc.contributor.authorEneman, Geert
dc.contributor.authorCaymax, Matty
dc.contributor.authorMeuris, Marc
dc.contributor.authorHoriguchi, Naoto
dc.contributor.authorThean, Aaron
dc.date.accessioned2021-10-20T18:46:06Z
dc.date.available2021-10-20T18:46:06Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21826
dc.sourceIIOimport
dc.titleIntegration of III-V on Si for high-mobility CMOS
dc.typeProceedings paper
dc.contributor.imecauthorWaldron, Niamh
dc.contributor.imecauthorMerckling, Clement
dc.contributor.imecauthorBrammertz, Guy
dc.contributor.imecauthorOng, Patrick
dc.contributor.imecauthorWinderickx, Gillis
dc.contributor.imecauthorHellings, Geert
dc.contributor.imecauthorEneman, Geert
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.imecauthorThean, Aaron
dc.contributor.orcidimecMerckling, Clement::0000-0003-3084-2543
dc.contributor.orcidimecBrammertz, Guy::0000-0003-1404-7339
dc.contributor.orcidimecOng, Patrick::0000-0002-2072-292X
dc.contributor.orcidimecHellings, Geert::0000-0002-5376-2119
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conferenceInternational Silicon-Germanium Technology and Device Meeting - ISTDM
dc.source.conferencedate4/06/2012
dc.source.conferencelocationBerkeley, CA USA
imec.availabilityPublished - open access


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