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Publication:

Outgassing study of thin films used for poly-SiGe based vacuum packaging of MEMS

Date

2012

Proceedings Paper

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Files

23169.pdf 178.5 KB

Author(s)

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Wevers, Martine

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De Wolf, Ingrid

Statistics

1999 since deposited on 2021-10-20

1last month

Acq. date: 2026-07-27