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Outgassing study of thin films used for poly-SiGe based vacuum packaging of MEMS
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1993 since deposited on 2021-10-20
2last month
Acq. date: 2026-01-07
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Metrics
Views
1993 since deposited on 2021-10-20
2last month
Acq. date: 2026-01-07
Citations