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Grating couplers in polymer with a thin Si3N4 layer embedded

dc.contributor.authorWang, Linghua
dc.contributor.authorLi, YanLu
dc.contributor.authorPorcel, Marco Garcia
dc.contributor.authorVermeulen, Diedrik
dc.contributor.authorHan, Xiuyou
dc.contributor.authorWang, Linyan
dc.contributor.authorJian, Xigao
dc.contributor.authorZhao, Mingshan
dc.contributor.authorMorthier, Geert
dc.date.accessioned2021-10-20T18:49:54Z
dc.date.available2021-10-20T18:49:54Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21833
dc.sourceIIOimport
dc.titleGrating couplers in polymer with a thin Si3N4 layer embedded
dc.typeProceedings paper
dc.contributor.imecauthorLi, YanLu
dc.contributor.imecauthorMorthier, Geert
dc.contributor.orcidimecLi, YanLu::0000-0003-3440-1972
dc.contributor.orcidimecMorthier, Geert::0000-0003-1819-6489
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage825817
dc.source.conferenceOrganic Photonic Materials and Devices XIV
dc.source.conferencedate21/01/2012
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - open access
imec.internalnotesProceedings of SPIE; Vol. 8258


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