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High-quality cubic BN thin films prepared by rf magnetron sputtering without argonion bombardment

dc.contributor.authorWang, Q.
dc.contributor.authorYin, H.
dc.contributor.authorPunniyakoti, S.
dc.contributor.authorShan, L.
dc.contributor.authorD'Olieslaeger, Marc
dc.contributor.authorHaenen, Ken
dc.contributor.authorBoyen, Hans-Gerd
dc.date.accessioned2021-10-20T18:52:40Z
dc.date.available2021-10-20T18:52:40Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21838
dc.sourceIIOimport
dc.titleHigh-quality cubic BN thin films prepared by rf magnetron sputtering without argonion bombardment
dc.typeOral presentation
dc.contributor.imecauthorD'Olieslaeger, Marc
dc.contributor.imecauthorHaenen, Ken
dc.contributor.imecauthorBoyen, Hans-Gerd
dc.contributor.orcidimecHaenen, Ken::0000-0001-6711-7367
dc.source.peerreviewno
dc.source.conferenceHasselt Diamond Workshop - SBDD XVII
dc.source.conferencedate14/03/2012
dc.source.conferencelocationHasselt Belgium
imec.availabilityPublished - imec


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