Publication:

Integration of a k=2.3 spin-on polymer for the sub-28nm technology node

Date

2012
Proceedings Paper
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Author(s)

Wilson, Chris  
;
Lazzarino, Frederic  
;
Truffert, Vincent  
;
Kirimura, Tomoyuki
;
de Marneffe, Jean-Francois  
;
Verdonck, Patrick  
;
Hirai, M.
;
Nakatani, K.
;
Tada, M.
;
Heylen, Nancy  
;
El-Mekki, Zaid  
;
Vanstreels, Kris  
;
Van Besien, Els  
;
Ciofi, Ivan  
;
Stucchi, Michele  
;
Croes, Kristof  
;
Zhang, Liping  
;
Demuynck, Steven  
;
Ercken, Monique  
;
Xu, Kaidong
;
Baklanov, Mikhaïl
;
Tokei, Zsolt  

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Abstract

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1929 since deposited on 2021-10-20
Acq. date: 2026-06-21

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1929 since deposited on 2021-10-20
Acq. date: 2026-06-21

Citations