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Critical material properties for pattern collapse mitigation

dc.contributor.authorWinroth, Gustaf
dc.contributor.authorYounkin, Todd
dc.contributor.authorBlackwell, James M.
dc.contributor.authorGronheid, Roel
dc.date.accessioned2021-10-20T19:01:45Z
dc.date.available2021-10-20T19:01:45Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21855
dc.sourceIIOimport
dc.titleCritical material properties for pattern collapse mitigation
dc.typeProceedings paper
dc.contributor.imecauthorGronheid, Roel
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage83250R
dc.source.conferenceAdvances in Resist Materials and Processing Technology XXIX
dc.source.conferencedate12/02/2012
dc.source.conferencelocationSan Jose, CA USA
imec.availabilityPublished - open access
imec.internalnotesProceedings of SPIE; Vol. 8325


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