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Carbon nanotube growth for high aspect ratio interconnect applications

dc.contributor.authorXie, Rongsie
dc.contributor.authorZhang, Can
dc.contributor.authorChen, Bingan
dc.contributor.authorZhong, Guofang
dc.contributor.authorRobertson, john
dc.contributor.authorvan der Veen, Marleen
dc.date.accessioned2021-10-20T19:07:22Z
dc.date.available2021-10-20T19:07:22Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21866
dc.sourceIIOimport
dc.titleCarbon nanotube growth for high aspect ratio interconnect applications
dc.typeMeeting abstract
dc.contributor.imecauthorvan der Veen, Marleen
dc.contributor.orcidimecvan der Veen, Marleen::0000-0002-9402-8922
dc.source.peerreviewyes
dc.source.beginpageO67
dc.source.conference23rd International Conference on Diamond and Carbon Materials
dc.source.conferencedate3/09/2012
dc.source.conferencelocationGranada Spain
dc.identifier.urlhttps://elsevier.conference-services.net/resources/247/3113/pdf/DIAM2012_0451.pdf
imec.availabilityPublished - imec


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