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Laser anneal PEB: a viable route to RLS improvement

dc.contributor.authorYounkin, Todd
dc.contributor.authorRosseel, Erik
dc.contributor.authorGronheid, Roel
dc.date.accessioned2021-10-20T19:23:39Z
dc.date.available2021-10-20T19:23:39Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21897
dc.sourceIIOimport
dc.titleLaser anneal PEB: a viable route to RLS improvement
dc.typeOral presentation
dc.contributor.imecauthorRosseel, Erik
dc.contributor.imecauthorGronheid, Roel
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conferenceAdvances in Resist Materials and Processing Technology XXIX
dc.source.conferencedate12/02/2012
dc.source.conferencelocationSan Jose, CA USA
imec.availabilityPublished - open access


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